Physical Design for Surface-Micromachined MEMS
Abstract
We are developing physical design tools for surface-micromachined MEMS, such as polysilicon microstructures built using MCNC? Multi-User MEMS Process service. Our initial efforts include automation of layout synthesis and behavioral simulation from a MEMS schematic representation. As an example, layout synthesis of a folded-flexure electrostatic comb-drive microresonator is demonstrated. Lumped-parameter electromechanical models with two mechanical degrees-of-freedom link the physical and behavioral parameters of the microresonator. Simulated annealing is used to generate global optimized layouts of five different resonators from 3 kHz to 300 kHz starting with mixed-domain behavioral specifications and constraints. Development of the synthesis tool enforces codification of all relevant MEMS design variables and constraints. The synthesis approach allows a rapid exploration of MEMS design issues.
BibTeX
@workshop{Fedder-1996-14115,author = {Gary K. Fedder and Tamal Mukherjee},
title = {Physical Design for Surface-Micromachined MEMS},
booktitle = {Proceedings of 5th ACM/SIGDA Physical Design Workshop},
year = {1996},
month = {April},
pages = {53 - 60},
}