/Gary K. Fedder

Gary K. Fedder

Portrait of Gary K. Fedder
Vice Provost for Research
Office: 406 Warner Hall
Phone: (412) 268-8443

Mailing Address

As information systems have evolved from isolated computational engines to distributed networks, the autonomous ability to gather and act on information is becoming increasingly important. My research is in the interdisciplinary area of MicroElectroMechanical Systems (MEMS): sensor and actuator systems with performance derived from integration of electronics and mechanical structures with features measured in microns to millimeters. Fabrication of the batch-fabricated electromechanical devices and the development of related processes leverage the enormous investment in mature Very-Large-Scale Integrated (VLSI) circuit manufacturing. Benefits of this approach include much lower manufacturing cost, greater miniaturization, greater integration, and in many cases higher performance than can be achieved with conventional methods used to build systems requiring sensors and actuators. My research focus on integrated MEMS will eventually lead to the manufacture of low-cost sensor-and-actuator Application-Specific Integrated Circuits (ASICs). Integrated MEMS technology will be pervasive in future embedded systems.

Our research group designs, fabricates, and tests microdevices that are primarily made using a process in high conventional foundry CMOS is followed by simple micromachining steps. This process provides us with high-performance electronics integrated on chip with electrostatically actuated microstructures, capacitive and piezoresistive sensors, and polysilicon thermal heaters. Projects include micromechanisms for magnetic probe-based data storage, accelerometers and gyroscopes for inertial sensing, and ciliary sensors for tactile and acoustic imaging. Of particular interest is how large arrays of these sensors and actuators may improve overall system-level performance. Issues include system design and integration, distributed control and communication, and interfacing to the environment.

MEMS are coupled multi-domain systems and, therefore, are difficult to design without expertise in a diverse set of fields. To address this problem in our lab, MEMS designers and CAD developers work closely together in a synergetic research environment. We are developing a multi-domain hierarchical design methodology to speed up the design cycle. A MEMS schematic is being developed in which mechanical, electromechanical, and electronic elements are graphically interconnected, resulting in rapid simulation and evaluation of designs. We are also modeling topologies for common MEMS applications, such as accelerometry, to codify design constraints for use in automated synthesis tools.

Displaying 27 Publications
BioImplantable Bone Stress Sensor
Fernando Alfaro, Lee Weiss, Phil Campbell, M.C. Miller, C. Heyward, J.S. Doctor and Gary K. Fedder

Conference Paper, Proceedings of the 2005 IEEE Engineering in Medicine and Biology 27th Annual Conference (EMBS '05), September, 2005
“Chip-Size” Antennas for Implantable Sensors and Smart Dust
P. Basset, Fernando Alfaro, D. Novosel, A. de la Plaza, D. Stancil and Gary K. Fedder

Conference Paper, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), pp. 457 - 460, June, 2005
Suspended, porous cellulose acetate membranes for microdialysis use
George Lopez Subrebost and Gary K. Fedder

Conference Paper, Proceedings of the Sixth International Symposium on Micro Total Analysis System (mTAS 2004), Malmo, Sweden, September, 2004
Actuation for Probe-Based Mass Data Storage
Fernando Alfaro and Gary K. Fedder

Conference Paper, Technical Proceedings of the Fifth International Conference on Modeling and Simulation of Microsystems (MSM '02), pp. 202 - 205, April, 2002
Developments in Chlorine Detection in Concrete using NMR
J.H. Garrett, Gary K. Fedder, K.M. Frederick, J.J. Hsu, I.J. Lowe, M.E. Patton, P. Sides and H.A. Yun

Conference Paper, SPIE Smart Structures Conference SS05: Systems for Bridges, Structures, and Highways, March, 2002
MEMS memory elements
Richard Carley, R.T. El-Sayed, David Guillou, Fernando Alfaro, Gary K. Fedder, S. Schlosser, D. Nagle, G. Ganger and Jim Bain

Conference Paper, Proceedings of the 2001 Non-Volatile Memory Technology Symposium (NVMTS '01), November, 2001
A Comparison of Induction-Detection NMR and Force-Detection NMR on Micro-NMR Device Design
Wen-Chieh Lin and Gary K. Fedder

Tech. Report, CMU-RI-TR-01-06, Robotics Institute, Carnegie Mellon University, March, 2001
A CMOS-MEMS lateral-axis gyroscope
Huikai Xie and Gary K. Fedder

Conference Paper, Proceedings of The 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01), pp. 162 - 165, January, 2001
Emerging simulation approaches for micromachined devices
Tamal Mukherjee, Gary K. Fedder, D. Ramaswamy and J. White

Journal Article, Carnegie Mellon University, IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, Vol. 19, No. 12, pp. 1572 - 1589, December, 2000
Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives
Huikai Xie, Lars Erdmann, Qi Jing and Gary K. Fedder

Conference Paper, Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems (MSM 2000), pp. 181 - 184, March, 2000
A 1 mG lateral CMOS-MEMS accelerometer
Hao Luo, Gary K. Fedder and Richard Carley

Conference Paper, Proceedings of The 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), pp. 502 - 507, January, 2000
A CMOS z-axis capacitive accelerometer with comb-finger sensing
Huikai Xie and Gary K. Fedder

Conference Paper, Proceedings of The 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), pp. 496 - 501, January, 2000
A lateral capacitive CMOS accelerometer with structural curl compensation
G. Zhang, Huikai Xie, L.E. de Rosset and Gary K. Fedder

Conference Paper, Proceedings of The 12th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '99), pp. 606 - 611, January, 1999
Design Methodology for Mixed-Domain Systems-on-a-Chip
Tamal Mukherjee and Gary K. Fedder

Conference Paper, IEEE Computer Society Workshop on VLSI, April, 1998
Hierarchical Representation and Simulation of Micromachined Inertial Sensors
J.E. Vandemeer, M.S. Kranz and Gary K. Fedder

Conference Paper, Modeling and Simulation of Micromsystems Conference, April, 1998
Mechanical Property Measurement of 0.5–m CMOS Microstructures
Michael Lu, Xu Zhu and Gary K. Fedder

Conference Paper, MRS 1998 Spring Meeting, April, 1998
Multi-mode Sensitive Layout Synthesis of Microresonator
Sitaraman Iyer, Tamal Mukherjee and Gary K. Fedder

Conference Paper, International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, April, 1998
Integrated MEMS in Conventional CMOS
Gary K. Fedder

Conference Paper, Proc. of the NSF/ASME Workshop on Tribology Issues and Opportunities in MEMS, November, 1997
Nodal Simulation of Suspended MEMS With Multiple Degrees of Freedom
Jan E. Vandemeer, Michael S. Kranz and Gary K. Fedder

Conference Paper, ASME Winter Annual Conference, November, 1997
Automated Optimal Synthesis of Microresonators
Gary K. Fedder, Sitaraman Iyer and Tamal Mukherjee

Conference Paper, 9th Int'l Conf. on Solid State Sensors and Actuators (Transducers '97), Vol. 2, pp. 1109-1112, June, 1997
Structured Design Of Microelectromechanical Systems
Tamal Mukherjee and Gary K. Fedder

Conference Paper, Proceedings of 34th Design Automation Conference, pp. 680-685, June, 1997
Micromechanical Vibratory Rate Gyroscopes Fabricated in Conventional CMOS
Gary K. Fedder and M.Kranz

Conference Paper, Symposium Gyro Technology, pp. 30-38, January, 1997
A Vision of Structured CAD for MEMS
Gary K. Fedder

Conference Paper, Proceedings of the Fifth ACM/SIGDA Physical Design Workshop, pp. 76-80, April, 1996
Design of a Modular Tactile Sensor and Actuator Based on an Electrorheological Gel
Richard Voyles, Gary K. Fedder and Pradeep Khosla

Conference Paper, Proceedings of 1996 IEEE International Conference on Robotics and Automation, Vol. 1, pp. 13 - 17, April, 1996
Physical Design for Surface-Micromachined MEMS
Gary K. Fedder and Tamal Mukherjee

Conference Paper, Proceedings of the Fifth ACM/SIGDA Physical Design Workshop, pp. 53-60, April, 1996
Laminated High-Aspect-Ratio Microstructures in a Conventional CMOS Process
Gary K. Fedder, Suresh Santhanam, M. L. Reed, Steve Eagle, D. F. Guillou, Michael Lu and L. R. Carley

Conference Paper, Proceedings of the IEEE Micro Electro Mechanical Systems Workshop, pp. 13-18, February, 1996
Modeling and Simulation of Microresonators with Meander Suspensions
Gary K. Fedder and K. H. Clark

Conference Paper, Simulation and Design of Microsystems and Microstructures, pp. 175-183, September, 1995

Past RI PhD Students

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