Physical model of a MEMS accelerometer for low-g motion tracking applications - Robotics Institute Carnegie Mellon University

Physical model of a MEMS accelerometer for low-g motion tracking applications

Wei-Tech Ang, Si Yi Khoo, Pradeep Khosla, and Cameron Riviere
Conference Paper, Proceedings of (ICRA) International Conference on Robotics and Automation, Vol. 2, pp. 1345 - 1351, April, 2004

Abstract

This paper develops a physical model of a MEMS capacitive accelerometer in order to use the accelerometer effectively in low-g motion tracking applications. The proposed physical model includes common physical parameters used to rate an accelerometer: scale factor, bias, and misalignment. Simple experiments used to reveal the behavior and characteristics of these parameters are described. A phenomenological modeling method is used to establish mathematical representations of these parameters in relation to errors such as nonlinearity, hysteresis, cross-axis effect, and temperature effect, without requiring a complete understanding of the underlying physics. Experimental results are presented, in which the physical model reduces RMSE by 93.1% in comparison with the manufacturer's recommended method.

BibTeX

@conference{Ang-2004-8908,
author = {Wei-Tech Ang and Si Yi Khoo and Pradeep Khosla and Cameron Riviere},
title = {Physical model of a MEMS accelerometer for low-g motion tracking applications},
booktitle = {Proceedings of (ICRA) International Conference on Robotics and Automation},
year = {2004},
month = {April},
volume = {2},
pages = {1345 - 1351},
}