Modeling and Simulation of Microresonators with Meander Suspensions - Robotics Institute Carnegie Mellon University

Modeling and Simulation of Microresonators with Meander Suspensions

Gary K. Fedder and K. H. Clark
Conference Paper, Proceedings of 1st International Conference on Simulation and Design of Microsystems and Microstructures, pp. 175 - 183, September, 1995

Abstract

Surface-micromachined comb-drive resonators suspended by meander springs are modeled and simulated. General analytic expressions for lateral spring constants and effective mass of meander springs are derived and verified by finite-element simulations. The spring constant equations are accurate to within 1% over a wide range of geometries. Analytic, simulated, and measured resonant frequency values agree to within 0.3% for each of ten different microresonator designs.

BibTeX

@conference{Fedder-1995-13980,
author = {Gary K. Fedder and K. H. Clark},
title = {Modeling and Simulation of Microresonators with Meander Suspensions},
booktitle = {Proceedings of 1st International Conference on Simulation and Design of Microsystems and Microstructures},
year = {1995},
month = {September},
pages = {175 - 183},
publisher = {Computational Mechanics Publications},
}