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Application Specific Integrated MEMS Process Service (ASIMPS)
Head: Gary K. Fedder
Contact: Gary K. Fedder
Mailing address:
Carnegie Mellon University
Robotics Institute
5000 Forbes Avenue
Pittsburgh, PA 15213
Associated lab(s) / group(s):
 Microelectromechanical Systems Laboratory
Project Homepage
Publications
  • Physical Design for Surface-Micromachined MEMS

    Gary K. Fedder and Tamal Mukherjee
    Proceedings of the Fifth ACM/SIGDA Physical Design Workshop, April, 1996, pp. 53-60.
    Details | pdf (120KB) | Copyrighted