Carnegie Mellon University
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Tactile Displays Using MEMS Actuator Arrays
This project is no longer active.
Head: Gary K. Fedder
Contact: George Lopez Subrebost
Mailing address:
Carnegie Mellon University
Electrical & Computer Engineering
5000 Forbes Avenue
Pittsburgh, PA 15213
Associated lab(s) / group(s):
 Microelectromechanical Systems Laboratory
We are developing tactile dusplays using MEMS actuator arrays. The 24 actuators on the 1cm x 1cm die were made using a two-layer polysilicon surface micromachining process along with a final metal layer. Polysilicon is used as the structural material, deposited oxide (PSG) as the sacrificial material, and silicon nitride for electrical isolation from the substrate. Various designs were implemented on a single die for further testing.