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Microelectromechanical Systems Laboratory (MEMS Laboratory)
Head: Gary Fedder and Kaigham Gabriel
Contact: Mary L. Moore
Mailing address:
Carnegie Mellon University
Electrical & Computer Engineering
5000 Forbes Avenue
Pittsburgh, PA 15213

Location:
HH 1207
Lab Homepage
Publications
  • A Multi Axial BioImplantable MEMS Array Bone Stress Sensor

    Fernando Alfaro
    doctoral dissertation, tech. report CMU-RI-TR-07-31, Robotics Institute, Carnegie Mellon University, August, 2007
    Details | pdf (33MB) | Copyrighted

  • BioImplantable Bone Stress Sensor

    Fernando Alfaro, Lee Weiss, Phil Campbell, M.C. Miller, C. Heyward, J.S. Doctor, and Gary Fedder
    Proceedings of the 2005 IEEE Engineering in Medicine and Biology 27th Annual Conference (EMBS '05), September, 2005.
    Details

  • "Chip-Size" Antennas for Implantable Sensors and Smart Dust

    P. Basset, Fernando Alfaro, D. Novosel, A. de la Plaza, D. Stancil, and Gary Fedder
    The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), June, 2005, pp. 457 - 460.
    Details

  • Silicon-based microdialysis chip with integrated fraction collection and biofouling control

    George Lopez Subrebost
    doctoral dissertation, tech. report CMU-RI-TR-05-53, Robotics Institute, Carnegie Mellon University, October, 2005
    Details | pdf (15MB) | Copyrighted

  • Conductive Polymer 'Molecular Wires' Increase Electrical Conductance Across Artificial Cell Membranes

    Alik Sunil Widge, M. Jeffries-El, and Yoky Matsuoka
    In The 26th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, September, 2004, pp. 5058 - 5063.
    Details | pdf (384KB) | Copyrighted

  • Conductive Polymer 'Molecular Wires' For Neuro-Robotic Interfaces

    Alik Sunil Widge, M. Jeffries-El, Carl Lagenaur, Victor Weedn, and Yoky Matsuoka
    Proceedings of the 2004 IEEE International Conference on Robotics and Automation (ICRA '04), May, 2004.
    Details | pdf (536KB) | Copyrighted

  • Mock CMOS: An Inexpensive, Fast, and Versatile Microfabrication Technique Using One Metal and One Silicon Dioxide Film

    George Lopez Subrebost
    tech. report CMU-RI-TR-02-13, Robotics Institute, Carnegie Mellon University, May, 2002
    Details | pdf (3MB) | Copyrighted

  • Actuation for Probe-Based Mass Data Storage

    Fernando Alfaro and Gary Fedder
    Technical Proceedings of the Fifth International Conference on Modeling and Simulation of Microsystems (MSM '02), April, 2002, pp. 202 - 205.
    Details

  • In Situ Fabricated Microchannels Using Porous Polymer and Xenon Difluoride Etchant

    George Lopez Subrebost, Alan J. Rosenbloom, Victor Weedn, and Kaigham Gabriel
    Proceedings of the Sixth International Symposium on Micro Total Analysis System (mTAS 2002), Nara, Japan, Nov. 2-8, 2002., November, 2002.
    Details

  • A Versatile, Fast and Inexpensive Microfabrication Technique Using a One Metal and One Silicon Dioxide Film

    George Lopez Subrebost and Kaigham Gabriel
    Proceedings of the 2002 ASME International Mechanical Engineering Congress and Exposition (IMECE 2002), New Orleans, CA, November 17-22, 2002., November, 2002.
    Details

  • A Comparison of Induction-Detection NMR and Force-Detection NMR on Micro-NMR Device Design

    Wen-Chieh Lin and Gary Fedder
    tech. report CMU-RI-TR-01-06, Robotics Institute, Carnegie Mellon University, March, 2001
    Details | pdf (146KB) | Copyrighted

  • A CMOS-MEMS lateral-axis gyroscope

    Huikai Xie and Gary Fedder
    Proceedings of The 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01), January, 2001, pp. 162 - 165.
    Details | pdf (470KB) | Copyrighted

  • MEMS memory elements

    Richard Carley, R.T. El-Sayed, David Guillou, Fernando Alfaro, Gary Fedder, S. Schlosser, D. Nagle, G. Ganger, and Jim Bain
    Proceedings of the 2001 Non-Volatile Memory Technology Symposium (NVMTS '01), November, 2001, pp. 1 - 5.
    Details

  • Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives

    Huikai Xie, Lars Erdmann, Qi Jing, and Gary Fedder
    Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems (MSM 2000), March, 2000, pp. 181 - 184.
    Details | pdf (113KB) | Copyrighted

  • A CMOS z-axis capacitive accelerometer with comb-finger sensing

    Huikai Xie and Gary Fedder
    Proceedings of The 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), January, 2000, pp. 496 - 501.
    Details | pdf (540KB) | Copyrighted

  • A 1 mG lateral CMOS-MEMS accelerometer

    Hao Luo, Gary Fedder, and Richard Carley
    Proceedings of The 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), January, 2000, pp. 502 - 507.
    Details | pdf (492KB) | Copyrighted

  • Emerging simulation approaches for micromachined devices

    Tamal Mukherjee, Gary Fedder, D. Ramaswamy, and J. White
    IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, Vol. 19, No. 12, December, 2000, pp. 1572 - 1589.
    Details | pdf (336KB) | Copyrighted

  • A lateral capacitive CMOS accelerometer with structural curl compensation

    G. Zhang, Huikai Xie, L.E. de Rosset, and Gary Fedder
    Proceedings of The 12th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '99), January, 1999, pp. 606 - 611.
    Details | pdf (717KB) | Copyrighted

  • Multi-mode Sensitive Layout Synthesis of Microresonator

    Sitaraman Iyer, Tamal Mukherjee, and Gary Fedder
    International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, April, 1998.
    Details | pdf (2MB) | Copyrighted

  • Mechanical Property Measurement of 0.5--m CMOS Microstructures

    Michael Lu, Xu Zhu, and Gary Fedder
    MRS 1998 Spring Meeting, April, 1998.
    Details | pdf (171KB) | Copyrighted

  • Hierarchical Representation and Simulation of Micromachined Inertial Sensors

    J.E. Vandemeer, M.S. Kranz, and Gary Fedder
    Modeling and Simulation of Micromsystems Conference, April, 1998.
    Details | pdf (318KB) | Copyrighted

  • Design Methodology for Mixed-Domain Systems-on-a-Chip

    Tamal Mukherjee and Gary Fedder
    IEEE Computer Society Workshop on VLSI, April, 1998.
    Details | pdf (93KB) | Copyrighted

  • Structured Design Of Microelectromechanical Systems

    Tamal Mukherjee and Gary Fedder
    Proceedings of 34th Design Automation Conference, June, 1997, pp. 680-685.
    Details | pdf (135KB) | Copyrighted

  • Automated Optimal Synthesis of Microresonators

    Gary Fedder, Sitaraman Iyer, and Tamal Mukherjee
    9th Int'l Conf. on Solid State Sensors and Actuators (Transducers '97), June, 1997, pp. 1109-1112.
    Details | pdf (617KB) | Copyrighted

  • Distributed MEMS: New Challenges for Computation

    A. Berlin and Kaigham Gabriel
    IEEE Computational Science and Engineering Journal, Vol. 4, No. 1, March, 1997, pp. 12-16.
    Details | pdf (133KB) | Copyrighted

  • Nodal Simulation of Suspended MEMS With Multiple Degrees of Freedom

    Jan E. Vandemeer, Michael S. Kranz, and Gary Fedder
    ASME Winter Annual Conference, November, 1997.
    Details | pdf (92KB) | Copyrighted

  • Integrated MEMS in Conventional CMOS

    Gary Fedder
    Proc. of the NSF/ASME Workshop on Tribology Issues and Opportunities in MEMS, November, 1997.
    Details | pdf (250KB) | Copyrighted

  • Physical Design for Surface-Micromachined MEMS

    Gary Fedder and Tamal Mukherjee
    Proceedings of the Fifth ACM/SIGDA Physical Design Workshop, April, 1996, pp. 53-60.
    Details | pdf (120KB) | Copyrighted

  • A Vision of Structured CAD for MEMS

    Gary Fedder
    Proceedings of the Fifth ACM/SIGDA Physical Design Workshop, April, 1996, pp. 76-80.
    Details | pdf (53KB) | Copyrighted

  • Laminated High-Aspect-Ratio Microstructures in a Conventional CMOS Process

    Gary Fedder, Suresh Santhanam, M. L. Reed, Steve Eagle, D. F. Guillou, Michael Lu, and L. R. Carley
    Proceedings of the IEEE Micro Electro Mechanical Systems Workshop, February, 1996, pp. 13-18.
    Details | pdf (1MB) | Copyrighted

  • Modeling and Simulation of Microresonators with Meander Suspensions

    Gary Fedder and K. H. Clark
    Simulation and Design of Microsystems and Microstructures, September, 1995, pp. 175-183.
    Details | pdf (175KB) | Copyrighted