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		Microelectromechanical Systems Laboratory (MEMS Laboratory) Head: Gary Fedder and Kaigham Gabriel Contact: Mary L. Moore Mailing address: Carnegie Mellon University Electrical & Computer Engineering 5000 Forbes Avenue Pittsburgh, PA 15213 Location: HH 1207 Lab Homepage

Current Projects [Past Projects]
		Application Specific Integrated MEMS Process Service Creating the design, fabrication and characterization support for enabling integration of MEMS and CMOS to span from low cost prototyping to high volume production.
		Circuit Extraction from MEMS Layout We are developing a MEMS extraction module which reads in the geometric description of the layout structure and reconstructs the corresponding schematic.
		Foundation for MEMS Synthesis shorten MEMS development cycle
		High-Aspect-Ratio CMOS Micromachining Process We have developed an integrated CMOS- MEMS process in which electrostatically actuated microstructures with high-aspect-ratio composite-beam suspensions are fabricated using conventional CMOS processing.
		Integrated MEMS Inertial Measurement Unit Developing a monolithic inertial measurement unit that exploits integrated-microdevice CAD tools to achieve superior system performance over individual microdevices.
		Resonator Synthesis We have developed a resonator synthesis module; the first in a series of synthesis modules to overcome the lack of MEMS Cell Libraries.
		Schematic Design for MEMS We have developed nodal simulation software to enable a structured representation for MEMS design using a hierarchical set of MEM components.
		Ultra-High-Density Data Cache for Low-Power Communications Demonstrating technology for a 10 GB/cm2 rewritable data storage system using MEMS-based actuators and magnetic recording.