Carnegie Mellon Robotics Institute
|Current Projects [Past Projects]|
|Application Specific Integrated MEMS Process Service
Creating the design, fabrication and characterization support for enabling integration of MEMS and CMOS to span from low cost prototyping to high volume production.
|Circuit Extraction from MEMS Layout
We are developing a MEMS extraction module which reads in the geometric description of the layout structure and reconstructs the corresponding schematic.
|Foundation for MEMS Synthesis
shorten MEMS development cycle
|High-Aspect-Ratio CMOS Micromachining Process
We have developed an integrated CMOS- MEMS process in which electrostatically actuated microstructures with high-aspect-ratio composite-beam suspensions are fabricated using conventional CMOS processing.
|Integrated MEMS Inertial Measurement Unit
Developing a monolithic inertial measurement unit that exploits integrated-microdevice CAD tools to achieve superior system performance over individual microdevices.
We have developed a resonator synthesis module; the first in a series of synthesis modules to overcome the lack of MEMS Cell Libraries.
|Schematic Design for MEMS
We have developed nodal simulation software to enable a structured representation for MEMS design using a hierarchical set of MEM components.
|Ultra-High-Density Data Cache for Low-Power Communications
Demonstrating technology for a 10 GB/cm2 rewritable data storage system using MEMS-based actuators and magnetic recording.
|The Robotics Institute is part of the School of Computer Science, Carnegie Mellon University.|
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