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Actuation for Probe-Based Mass Data Storage
F. Alfaro and G. Fedder
Technical Proceedings of the Fifth International Conference on Modeling and Simulation of Microsystems (MSM '02), April, 2002, pp. 202 - 205.

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Associated lab/group: Microelectromechanical Systems Laboratory

Number of pages: 4

F. Alfaro and G. Fedder, "Actuation for Probe-Based Mass Data Storage," Technical Proceedings of the Fifth International Conference on Modeling and Simulation of Microsystems (MSM '02), April, 2002, pp. 202 - 205.

@inproceedings{Alfaro_2002_5964,
   author = "Fernando Alfaro and Gary Fedder",
   title = "Actuation for Probe-Based Mass Data Storage",
   booktitle = "Technical Proceedings of the Fifth International Conference on Modeling and Simulation of Microsystems (MSM '02)",
   month = "April",
   year = "2002",
   pages = "202 - 205"
}