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Physical model of a MEMS accelerometer for low-g motion tracking applications
W. Ang, S. Khoo, P. Khosla, and C. Riviere
Proceedings of the 2004 IEEE International Conference on Robotics and Automation (ICRA '04), Vol. 2, April, 2004, pp. 1345 - 1351.

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This paper develops a physical model of a MEMS capacitive accelerometer in order to use the accelerometer effectively in low-g motion tracking applications. The proposed physical model includes common physical parameters used to rate an accelerometer: scale factor, bias, and misalignment. Simple experiments used to reveal the behavior and characteristics of these parameters are described. A phenomenological modeling method is used to establish mathematical representations of these parameters in relation to errors such as nonlinearity, hysteresis, cross-axis effect, and temperature effect, without requiring a complete understanding of the underlying physics. Experimental results are presented, in which the physical model reduces RMSE by 93.1% in comparison with the manufacturer's recommended method.

Associated center: MRTC
Associated lab/group: Medical Instrumentation Lab
Associated project: Micron: Intelligent Microsurgical Instruments

Number of pages: 7

W. Ang, S. Khoo, P. Khosla, and C. Riviere, "Physical model of a MEMS accelerometer for low-g motion tracking applications," Proceedings of the 2004 IEEE International Conference on Robotics and Automation (ICRA '04), Vol. 2, April, 2004, pp. 1345 - 1351.

@inproceedings{Ang_2004_5424,
   author = "Wei-Tech Ang and Si Yi Khoo and Pradeep Khosla and Cameron Riviere",
   title = "Physical model of a MEMS accelerometer for low-g motion tracking applications",
   booktitle = "Proceedings of the 2004 IEEE International Conference on Robotics and Automation (ICRA '04)",
   month = "April",
   year = "2004",
   volume = "2",
   pages = "1345 - 1351"
}