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RI | Publications | Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives
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Text only version of this site
Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives
H. Xie, L. Erdmann, Q. Jing, and G. Fedder
Technical Proceedings of the 2000 International
Conference on Modeling and Simulation of
Microsystems (MSM 2000), March, 2000, pp. 181 - 184.
Jump to: Download | Abstract | Notes | Text Reference | BibTeX Reference
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| Abstract |
This paper reports the first design and its simulation and experimental results of a CMOS z-axis microactuator that utilizes the vertical electrostatic forces existing between multi-conductor comb fingers. The measured maximum displacement of the z-axis microactuator is 3.5 µm, and resonant frequency 6.17 kHz, which are in good agreement with the field simulation and the behavioral simulation results using the NODAS library [1]. The advantages of the z-axis actuator include compatibility with standard CMOS processes and easy implementation of 3-axis microstages, integrated position sensing components and motion control circuits.
| Notes |
Associated lab/group: Microelectromechanical Systems Laboratory
Number of pages: 4
| Text Reference |
H. Xie, L. Erdmann, Q. Jing, and G. Fedder, "Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives," Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems (MSM 2000), March, 2000, pp. 181 - 184.
| BibTeX Reference |
@inproceedings{Xie_2000_4431,
author = "Huikai Xie and Lars Erdmann and Qi Jing and Gary Fedder",
title = "Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives",
booktitle = "Technical Proceedings of the 2000 International
Conference on Modeling and Simulation of
Microsystems (MSM 2000)",
month = "March",
year = "2000",
pages = "181 - 184"
}