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A CMOS-MEMS lateral-axis gyroscope
H. Xie and G. Fedder
Proceedings of The 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01), January, 2001, pp. 162 - 165.

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Associated lab/group: Microelectromechanical Systems Laboratory

H. Xie and G. Fedder, "A CMOS-MEMS lateral-axis gyroscope," Proceedings of The 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01), January, 2001, pp. 162 - 165.

@inproceedings{Xie_2001_3636,
   author = "Huikai Xie and Gary Fedder",
   title = "A CMOS-MEMS lateral-axis gyroscope",
   booktitle = "Proceedings of The 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01)",
   month = "January",
   year = "2001",
   pages = "162 - 165"
}