|
|
|
|
RI | Publications | Nodal Simulation of Suspended MEMS With Multiple Degrees of Freedom
|
|
Text only version of this site
Nodal Simulation of Suspended MEMS With Multiple Degrees of Freedom
J.E. Vandemeer, M.S. Kranz, and G. Fedder
ASME Winter Annual Conference, November, 1997.
Jump to: Download | Abstract | Notes | Text Reference | BibTeX Reference
| Download [Help] |
Adobe portable document format (pdf) [91 KB]
Copyright notice: This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. These works may not be reposted without the explicit permission of the copyright holder.
| Abstract |
A mixed-domain schematic representation compatible with node-based behavioral simulators is developed for rapid design of suspended microelectromechanical systems (MEMS). Hierarchical models of several basic microelectromechanical elements are created. The components are interconnected to represent both devices and more complex systems. Using beams, masses, and electrostatic actuators as the fundamental building blocks, a nodal simulation of complete in-plane motion of a crab-leg resonator demonstrates the design approach. Electrical properties are included in the component models, enabling electrical and electromechanical signal analysis to be performed. This work is part of an continuing project that eventually will provide full six DOF models for a broad class of MEMS.
| Notes |
Associated lab/group: Microelectromechanical Systems Laboratory
| Text Reference |
J.E. Vandemeer, M.S. Kranz, and G. Fedder, "Nodal Simulation of Suspended MEMS With Multiple Degrees of Freedom," ASME Winter Annual Conference, November, 1997.
| BibTeX Reference |
@inproceedings{Vandemeer_1997_1487,
author = "Jan E. Vandemeer and Michael S. Kranz and Gary Fedder",
title = "Nodal Simulation of Suspended MEMS With Multiple Degrees of Freedom",
booktitle = "ASME Winter Annual Conference",
month = "November",
year = "1997"
}