Carnegie Mellon University
Nonlinear Regression Model of a Low-g MEMS Accelerometer

Wei-Tech Ang, Pradeep Khosla , and Cameron Riviere
IEEE Sensors Journal, Vol. 7, No. 1, pp. 81-88, January, 2007.

  • Adobe portable document format (pdf) (704KB)
Copyright notice: This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. These works may not be reposted without the explicit permission of the copyright holder.

This paper proposes a nonlinear regression model of a microelectromechanical systems capacitive accelerometer, targeted to be used in tilt sensing and low- motion-tracking applications. The proposed model for the accelerometer's deterministic errors includes common physical parameters used to rate an accelerometer: scale factor, bias, and misalignment. Simple experiments used to reveal the behavior and characteristics of these parameters are described. A phenomenological modeling method is used to establish mathematical representations of these parameters in relation to errors such as nonlinearity and cross-axis effect, without requiring a complete understanding of the underlying physics. Tilt and motion-sensing experiments show that the proposed model reduces sensing errors to a level close to the residual stochastic noise.

accelerometer, error modeling, inertial sensing

Sponsor: NIH, NSF
Grant ID: R01EB000526, EEC-9731748
Associated Center(s) / Consortia: Medical Robotics Technology Center
Associated Lab(s) / Group(s): Surgical Mechatronics Laboratory
Associated Project(s): Micron: Intelligent Microsurgical Instruments
Number of pages: 8

Text Reference
Wei-Tech Ang, Pradeep Khosla , and Cameron Riviere, "Nonlinear Regression Model of a Low-g MEMS Accelerometer," IEEE Sensors Journal, Vol. 7, No. 1, pp. 81-88, January, 2007.

BibTeX Reference
   author = "Wei-Tech Ang and Pradeep {Khosla } and Cameron Riviere",
   title = "Nonlinear Regression Model of a Low-g MEMS Accelerometer",
   journal = "IEEE Sensors Journal",
   pages = "81-88",
   month = "January",
   year = "2007",
   volume = "7",
   number = "1",