Physical model of a MEMS accelerometer for low-g motion tracking applications

Wei-Tech Ang, Si Yi Khoo, Pradeep Khosla, and Cameron Riviere
Proceedings of the 2004 IEEE International Conference on Robotics and Automation (ICRA '04), May, 2004, pp. 1345 - 1351.


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Abstract
This paper develops a physical model of a MEMS capacitive accelerometer in order to use the accelerometer effectively in low-g motion tracking applications. The proposed physical model includes common physical parameters used to rate an accelerometer: scale factor, bias, and misalignment. Simple experiments used to reveal the behavior and characteristics of these parameters are described. A phenomenological modeling method is used to establish mathematical representations of these parameters in relation to errors such as nonlinearity, hysteresis, cross-axis effect, and temperature effect, without requiring a complete understanding of the underlying physics. Experimental results are presented, in which the physical model reduces RMSE by 93.1% in comparison with the manufacturer's recommended method.

Notes
Associated Center(s) / Consortia: Medical Robotics Technology Center
Associated Lab(s) / Group(s): Surgical Mechatronics Laboratory
Associated Project(s): Micron: Intelligent Microsurgical Instruments
Number of pages: 7

Text Reference
Wei-Tech Ang, Si Yi Khoo, Pradeep Khosla, and Cameron Riviere, "Physical model of a MEMS accelerometer for low-g motion tracking applications," Proceedings of the 2004 IEEE International Conference on Robotics and Automation (ICRA '04), May, 2004, pp. 1345 - 1351.

BibTeX Reference
@inproceedings{Ang_2004_5424,
   author = "Wei-Tech Ang and Si Yi Khoo and Pradeep Khosla and Cameron Riviere",
   title = "Physical model of a MEMS accelerometer for low-g motion tracking applications",
   booktitle = "Proceedings of the 2004 IEEE International Conference on Robotics and Automation (ICRA '04)",
   pages = "1345 - 1351",
   month = "May",
   year = "2004",
   volume = "2",
}