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Abstract

This paper reports the first design and its simulation and experimental results of a CMOS z-axis microactuator that utilizes the vertical electrostatic forces existing between multi-conductor comb fingers. The measured maximum displacement of the z-axis microactuator is 3.5 ?, and resonant frequency 6.17 kHz, which are in good agreement with the field simulation and the behavioral simulation results using the NODAS library [1]. The advantages of the z-axis actuator include compatibility with standard CMOS processes and easy implementation of 3-axis microstages, integrated position sensing components and motion control circuits.

Keywords

vertical actuation, NODAS library, behavioral simulation, comb drive, CMOS micromachining process

Notes

Associated Lab(s) / Group(s): Microelectromechanical Systems Laboratory

Number of pages: 4

Text Reference

Huikai Xie, Lars Erdmann, Qi Jing, and Gary Fedder, "Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives," Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems (MSM 2000), March, 2000, pp. 181 - 184.

BibTeX Reference

@inproceedings{Xie_2000_4431,
   author = "Huikai Xie and Lars Erdmann and Qi Jing and Gary Fedder",
   title = "Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives",
   booktitle = "Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems (MSM 2000)",
   pages = "181 - 184",
   month = "March",
   year = "2000",
}

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