Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives

Huikai Xie, Lars Erdmann, Qi Jing, and Gary K. Fedder
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems (MSM 2000), March, 2000, pp. 181 - 184.


Download
  • Adobe portable document format (pdf) (113KB)
Copyright notice: This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. These works may not be reposted without the explicit permission of the copyright holder.

Abstract
This paper reports the first design and its simulation and experimental results of a CMOS z-axis microactuator that utilizes the vertical electrostatic forces existing between multi-conductor comb fingers. The measured maximum displacement of the z-axis microactuator is 3.5 ?, and resonant frequency 6.17 kHz, which are in good agreement with the field simulation and the behavioral simulation results using the NODAS library [1]. The advantages of the z-axis actuator include compatibility with standard CMOS processes and easy implementation of 3-axis microstages, integrated position sensing components and motion control circuits.

Keywords
vertical actuation, NODAS library, behavioral simulation, comb drive, CMOS micromachining process

Notes
Associated Lab(s) / Group(s): Microelectromechanical Systems Laboratory
Number of pages: 4

Text Reference
Huikai Xie, Lars Erdmann, Qi Jing, and Gary K. Fedder, "Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives," Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems (MSM 2000), March, 2000, pp. 181 - 184.

BibTeX Reference
@inproceedings{Xie_2000_4431,
   author = "Huikai Xie and Lars Erdmann and Qi Jing and Gary K Fedder",
   title = "Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives",
   booktitle = "Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems (MSM 2000)",
   pages = "181 - 184",
   month = "March",
   year = "2000",
}