The Robotics Institute
Carnegie Mellon Robotics Institute
In Situ Fabricated Microchannels Using Porous Polymer and Xenon Difluoride Etchant
George Lopez Subrebost, Alan J. Rosenbloom, Victor Weedn, and Kaigham Gabriel
Proceedings of the Sixth International Symposium on Micro Total Analysis System (mTAS 2002), Nara, Japan, Nov. 2-8, 2002., November, 2002.
| Abstract |
| A novel microfluidic fabrication technique which allows in situ formed silicon microchannels and does not necessitate substrate bonding is presented. A gas-permeable polymer membrane acts as the top surface of the microchannel, allowing xenon difluoride (XeF2) etchant to pass unobstructed to the silicon substrate. Exposed silicon areas on the wafer are then etched isotropically. |
| Keywords |
| Microchannels, Xenon difluoride, Porous polymer |
| Notes |
 Associated Lab(s) / Group(s):
Microelectromechanical Systems Laboratory |
| Text Reference |
| George Lopez Subrebost, Alan J. Rosenbloom, Victor Weedn, and Kaigham Gabriel, "In Situ Fabricated Microchannels Using Porous Polymer and Xenon Difluoride Etchant," Proceedings of the Sixth International Symposium on Micro Total Analysis System (mTAS 2002), Nara, Japan, Nov. 2-8, 2002., November, 2002. |
| BibTeX Reference |
|
@inproceedings{Subrebost_2002_4142, author = "George Lopez Subrebost and Alan J. Rosenbloom and Victor Weedn and Kaigham Gabriel", title = "In Situ Fabricated Microchannels Using Porous Polymer and Xenon Difluoride Etchant", booktitle = "Proceedings of the Sixth International Symposium on Micro Total Analysis System (mTAS 2002), Nara, Japan, Nov. 2-8, 2002.", month = "November", year = "2002", } |
| The Robotics Institute is part of the School of Computer Science, Carnegie Mellon University. Contact Us | Update Instructions |