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A CMOS-MEMS lateral-axis gyroscope

Huikai Xie and Gary Fedder
Proceedings of The 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01), January, 2001, pp. 162 - 165.


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Notes
Associated Lab(s) / Group(s): Microelectromechanical Systems Laboratory

Text Reference
Huikai Xie and Gary Fedder, "A CMOS-MEMS lateral-axis gyroscope," Proceedings of The 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01), January, 2001, pp. 162 - 165.

BibTeX Reference
@inproceedings{Xie_2001_3636,
   author = "Huikai Xie and Gary Fedder",
   title = "A CMOS-MEMS lateral-axis gyroscope",
   booktitle = "Proceedings of The 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01)",
   pages = "162 - 165",
   month = "January",
   year = "2001",
}

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