A CMOS-MEMS lateral-axis gyroscope

Huikai Xie and Gary K. Fedder
Proceedings of The 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01), January, 2001, pp. 162 - 165.


Download
  • Adobe portable document format (pdf) (470KB)
Copyright notice: This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. These works may not be reposted without the explicit permission of the copyright holder.

Notes
Associated Lab(s) / Group(s): Microelectromechanical Systems Laboratory

Text Reference
Huikai Xie and Gary K. Fedder, "A CMOS-MEMS lateral-axis gyroscope," Proceedings of The 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01), January, 2001, pp. 162 - 165.

BibTeX Reference
@inproceedings{Xie_2001_3636,
   author = "Huikai Xie and Gary K Fedder",
   title = "A CMOS-MEMS lateral-axis gyroscope",
   booktitle = "Proceedings of The 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01)",
   pages = "162 - 165",
   month = "January",
   year = "2001",
}