Modeling and Simulation of Microresonators with Meander Suspensions

Gary K. Fedder and K. H. Clark
Simulation and Design of Microsystems and Microstructures, September, 1995, pp. 175-183.


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Abstract
Surface-micromachined comb-drive resonators suspended by meander springs are modeled and simulated. General analytic expressions for lateral spring constants and effective mass of meander springs are derived and verified by finite-element simulations. The spring constant equations are accurate to within 1% over a wide range of geometries. Analytic, simulated, and measured resonant frequency values agree to within 0.3% for each of ten different microresonator designs.

Notes
Associated Lab(s) / Group(s): Microelectromechanical Systems Laboratory

Text Reference
Gary K. Fedder and K. H. Clark, "Modeling and Simulation of Microresonators with Meander Suspensions," Simulation and Design of Microsystems and Microstructures, September, 1995, pp. 175-183.

BibTeX Reference
@inproceedings{Fedder_1995_1495,
   author = "Gary K Fedder and K. H. Clark",
   title = "Modeling and Simulation of Microresonators with Meander Suspensions",
   booktitle = "Simulation and Design of Microsystems and Microstructures",
   pages = "175-183",
   publisher = "Computational Mechanics Publications",
   month = "September",
   year = "1995",
}