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Abstract

Surface-micromachined comb-drive resonators suspended by meander springs are modeled and simulated. General analytic expressions for lateral spring constants and effective mass of meander springs are derived and verified by finite-element simulations. The spring constant equations are accurate to within 1% over a wide range of geometries. Analytic, simulated, and measured resonant frequency values agree to within 0.3% for each of ten different microresonator designs.

Notes

Associated Lab(s) / Group(s): Microelectromechanical Systems Laboratory

Text Reference

Gary Fedder and K. H. Clark, "Modeling and Simulation of Microresonators with Meander Suspensions," Simulation and Design of Microsystems and Microstructures, September, 1995, pp. 175-183.

BibTeX Reference

@inproceedings{Fedder_1995_1495,
   author = "Gary Fedder and K. H. Clark",
   title = "Modeling and Simulation of Microresonators with Meander Suspensions",
   booktitle = "Simulation and Design of Microsystems and Microstructures",
   pages = "175-183",
   publisher = "Computational Mechanics Publications",
   month = "September",
   year = "1995",
}

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