The Robotics Institute

Carnegie Mellon Robotics Institute

Copyright notice: This material is presented to ensure timely dissemination of scholarly and technical work. Copyright and all rights therein are retained by authors or by other copyright holders. All persons copying this information are expected to adhere to the terms and constraints invoked by each author's copyright. These works may not be reposted without the explicit permission of the copyright holder.

Abstract

Computer-aided design tools tailored for microelectromechanical systems (MEMS) are needed to enable design of complex systems with multiple energy domains. In an analogy to the VLSI design methodology, physical, structural, and behavioral views of MEMS can be formed and coupled together in an integrated toolset. Of key importance is the formation of parameterized MEMS component libraries to support these views. Fast coupled-domain numerical (physical) simulation and behavioral simulation are required to move freely between the views.

Notes

Associated Lab(s) / Group(s): Microelectromechanical Systems Laboratory

Text Reference

Gary Fedder, "A Vision of Structured CAD for MEMS," Proceedings of the Fifth ACM/SIGDA Physical Design Workshop, April, 1996, pp. 76-80.

BibTeX Reference

@inproceedings{Fedder_1996_1493,
   author = "Gary Fedder",
   title = "A Vision of Structured CAD for MEMS",
   booktitle = "Proceedings of the Fifth ACM/SIGDA Physical Design Workshop",
   pages = "76-80",
   month = "April",
   year = "1996",
}

The Robotics Institute

Menu