Physical Design for Surface-Micromachined MEMS

Gary K. Fedder and Tamal Mukherjee
Proceedings of the Fifth ACM/SIGDA Physical Design Workshop, April, 1996, pp. 53-60.

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We are developing physical design tools for surface-micromachined MEMS, such as polysilicon microstructures built using MCNC? Multi-User MEMS Process service. Our initial efforts include automation of layout synthesis and behavioral simulation from a MEMS schematic representation. As an example, layout synthesis of a folded-flexure electrostatic comb-drive microresonator is demonstrated. Lumped-parameter electromechanical models with two mechanical degrees-of-freedom link the physical and behavioral parameters of the microresonator. Simulated annealing is used to generate global optimized layouts of five different resonators from 3 kHz to 300 kHz starting with mixed-domain behavioral specifications and constraints. Development of the synthesis tool enforces codification of all relevant MEMS design variables and constraints. The synthesis approach allows a rapid exploration of MEMS design issues.

Associated Lab(s) / Group(s): Microelectromechanical Systems Laboratory
Associated Project(s): Application Specific Integrated MEMS Process Service

Text Reference
Gary K. Fedder and Tamal Mukherjee, "Physical Design for Surface-Micromachined MEMS," Proceedings of the Fifth ACM/SIGDA Physical Design Workshop, April, 1996, pp. 53-60.

BibTeX Reference
   author = "Gary K Fedder and Tamal Mukherjee",
   title = "Physical Design for Surface-Micromachined MEMS",
   booktitle = "Proceedings of the Fifth ACM/SIGDA Physical Design Workshop",
   pages = "53-60",
   month = "April",
   year = "1996",