Computer Intensive Problems in Simulation of Integrated Circuit Lithography and Topography

A.R. Neureuther and Owen Carmichael
Proceedings NASA AMES Workshop, March, 1996.


Notes

Text Reference
A.R. Neureuther and Owen Carmichael, "Computer Intensive Problems in Simulation of Integrated Circuit Lithography and Topography," Proceedings NASA AMES Workshop, March, 1996.

BibTeX Reference
@inproceedings{Carmichael_1996_1295,
   author = "A.R. Neureuther and Owen Carmichael",
   title = "Computer Intensive Problems in Simulation of Integrated Circuit Lithography and Topography",
   booktitle = "Proceedings NASA AMES Workshop",
   month = "March",
   year = "1996",
}