The Robotics Institute
Carnegie Mellon Robotics Institute
Computer Intensive Problems in Simulation of Integrated Circuit Lithography and Topography
A.R. Neureuther and Owen Carmichael
Proceedings NASA AMES Workshop, March, 1996.
| Notes |
| Text Reference |
| A.R. Neureuther and Owen Carmichael, "Computer Intensive Problems in Simulation of Integrated Circuit Lithography and Topography," Proceedings NASA AMES Workshop, March, 1996. |
| BibTeX Reference |
|
@inproceedings{Carmichael_1996_1295, author = "A.R. Neureuther and Owen Carmichael", title = "Computer Intensive Problems in Simulation of Integrated Circuit Lithography and Topography", booktitle = "Proceedings NASA AMES Workshop", month = "March", year = "1996", } |
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