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[Project image] Integrated MEMS Inertial Measurement Unit (IMIMU)
Head: Gary Fedder
Contact: Gary Fedder (fedder@ece.cmu.edu)

Mailing address:
Carnegie Mellon University
Robotics Institute
5000 Forbes Avenue
Pittsburgh, PA 15213


Associated lab/group: Microelectromechanical Systems Laboratory

For more information, see this project's homepage.

This page last updated - January 1999.
Jump to: Project Description | Personnel

Project Description

Our goal is to develop an Integrated MEMS Inertial Measurement Unit (IMIMU) as a monolithically integrated microsystem, taking advantage of developing capabilities for the design and implementation of application-specific single-chip MEMS.

The IMIMU will integrate arrays of accelerometers and gyroscopes with analog signal conditioning circuitry and digital signal processing (DSP). The individual inertial sensors provide raw data with imperfections such as finite offsets, finite cross-axis sensitivities, and limited range. Data from an array can be combined to compensate for these imperfections. Ultimately, on-chip fusion of the sensor signals is to be accomplished by digitizing the signals and using DSP.

Due to the need for integration of microsensors with electronics, the IMU is being implemented in a CMOS-micromachining fabrication process. MEMS devices are made from the interconnect dielectric and metal layers present in conventional CMOS processes. Design complexity is being managed using the top-down design methodology for integrated MEMS design and by the back-end methodologies being developed within this project for feature recognition for extraction and MEMS testing.

Personnel [Past Members]

Name Title Email Address
Shawn Blanton Assistant Professor, ECE blanton@ece.cmu.edu
Richard's personal homepage Richard Carley Professor, ECE lrc@andrew.cmu.edu
Nilmoni Deb PhD Student, ECE ndeb@ece.cmu.edu
Gary's personal homepage Gary Fedder Prof. of ECE & Robotics;Director of ICES, RI/ICES fedder@ece.cmu.edu
Kai He Research Programmer, ECE khe@ece.cmu.edu
Sitaraman Iyer PhD Student, ECE sita@ece.cmu.edu
Qi Jing PhD Student, ECE qjing@ece.cmu.edu
Tamal's personal homepage Tamal Mukherjee Research Engineer, and Assistant Director, CEDA, ECE tamal@ece.cmu.edu

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