- A Versatile, Fast and Inexpensive Microfabrication Technique Using a One Metal and One Silicon Dioxide Film
George Lopez Subrebost and Kaigham Gabriel
Proceedings of the 2002 ASME International Mechanical Engineering Congress and Exposition (IMECE 2002), New Orleans, CA, November 17-22, 2002., November, 2002. Details
- In Situ Fabricated Microchannels Using Porous Polymer and Xenon Difluoride Etchant
George Lopez Subrebost, Alan J. Rosenbloom, Victor Weedn, and Kaigham Gabriel
Proceedings of the Sixth International Symposium on Micro Total Analysis System (mTAS 2002), Nara, Japan, Nov. 2-8, 2002., November, 2002. Details
- Distributed MEMS: New Challenges for Computation
A. Berlin and Kaigham Gabriel
IEEE Computational Science and Engineering Journal, Vol. 4, No. 1, March, 1997, pp. 12-16. Details |
pdf (133KB) | Copyrighted
- Engineering Microscopic Machines
Kaigham Gabriel
150th Anniversary Issue, Scientific American: Technology in the 21st Century, Vol. 273, No. 3, September, 1995, pp. 150-153. Details
- Surface-Normal Electrostatic Pneumatic Actuators
Kaigham Gabriel, O. Tabata, and S. Sugiyama
Proceedings of Micro Electro Mechanical Systems (MEMS '92), February, 1992, pp. 128 - 132. Details |
pdf (365KB) | Copyrighted
- Integrated Fabrication of Polysilicon Mechanisms
M. Mehregany, Kaigham Gabriel, and W.S. Trimmer
IEEE Transactions on Electron Devices, Vol. 35, No. 6, June, 1988, pp. 719-723. Details |
pdf (1MB) | Copyrighted
|