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| Michael Lu |
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| PhD Student, ECE |
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| No longer a member of RI. |
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| Publications |
- Mechanical Property Measurement of 0.5--m CMOS Microstructures
Michael Lu, Xu Zhu, and Gary Fedder
MRS 1998 Spring Meeting, April, 1998.
Details |
pdf (171KB) | Copyrighted
- Laminated High-Aspect-Ratio Microstructures in a Conventional CMOS Process
Gary Fedder, Suresh Santhanam, M. L. Reed, Steve Eagle, D. F. Guillou, Michael Lu, and L. R. Carley
Proceedings of the IEEE Micro Electro Mechanical Systems Workshop, February, 1996, pp. 13-18.
Details |
pdf (1MB) | Copyrighted
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