|Application Specific Integrated MEMS Process Service (ASIMPS)
Creating the design, fabrication and characterization support for enabling integration of MEMS and CMOS to span from low cost prototyping to high volume production.
|Foundation for MEMS Synthesis (MEMSYN)
shorten MEMS development cycle
|Integrated MEMS Inertial Measurement Unit (IMIMU)
Developing a monolithic inertial measurement unit that exploits integrated-microdevice CAD tools to achieve superior system performance over individual microdevices.
|Ultra-High-Density Data Cache for Low-Power Communications
Demonstrating technology for a 10 GB/cm2 rewritable data storage system using MEMS-based actuators and magnetic recording.
|The Robotics Institute is part of the School of Computer Science, Carnegie Mellon University.|
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