Carnegie Mellon Robotics Institute
|Application Specific Integrated MEMS Process Service (ASIMPS)
Creating the design, fabrication and characterization support for enabling integration of MEMS and CMOS to span from low cost prototyping to high volume production.
|Silicon Micro-Disk Arrays for Data Storage
Silicon microdisk fabrication
|The Robotics Institute is part of the School of Computer Science, Carnegie Mellon University.|
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