The Robotics Institute

Carnegie Mellon Robotics Institute

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Former RI Members

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		Steve Eagle PhD Student, ECE No longer a member of RI.

Past Projects
		Application Specific Integrated MEMS Process Service (ASIMPS) Creating the design, fabrication and characterization support for enabling integration of MEMS and CMOS to span from low cost prototyping to high volume production.
		Silicon Micro-Disk Arrays for Data Storage Silicon microdisk fabrication