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		William Benard PhD Student, ECE Email: Office: PH B21 Phone: (412) 268 2528   Mailing address: Carnegie Mellon University Robotics Institute 5000 Forbes Avenue Pittsburgh, PA 15213

Research Interests

My research interests are in the area of Distributed manufacturing of MEMS devices. More specifically the issues I am investigating are: The information required for MEMS designers to discriminate amongst, and design with unit MEMS fabrications steps Process design rule checking Quality control measurement for distributed manufacturing Development of standards for metrology, wafer handling and process organization