Carnegie Mellon University
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William Benard
PhD Student, ECE
No longer a member of RI.
Research Interests

My research interests are in the area of Distributed manufacturing of MEMS devices.

More specifically the issues I am investigating are:

  • The information required for MEMS designers to discriminate amongst, and design with unit MEMS fabrications steps

  • Process design rule checking

  • Quality control measurement for distributed manufacturing

  • Development of standards for metrology, wafer handling and process organization