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Publications, Microelectromechanical Systems Laboratory

Note: This list may not be comprehensive. It contains only those publications in the RI publications database. Entries are listed in reverse chronological order.

• A Multi Axial BioImplantable MEMS Array Bone Stress Sensor
  F. Alfaro
  doctoral dissertation, tech. report CMU-RI-TR-07-31, Robotics Institute, Carnegie Mellon University, August, 2007. [Abstract]
  Download: pdf [32874 KB] copyrighted

• Silicon-based microdialysis chip with integrated fraction collection and biofouling control
  G.L. Subrebost
  doctoral dissertation, tech. report CMU-RI-TR-05-53, Robotics Institute, Carnegie Mellon University, October, 2005. [Abstract]
  Download: pdf [14780 KB] copyrighted

• BioImplantable Bone Stress Sensor
  F. Alfaro, L. Weiss, P. Campbell, M.C. Miller, C. Heyward, J.S. Doctor, and G. Fedder
  Proceedings of the 2005 IEEE Engineering in Medicine and Biology 27th Annual Conference (EMBS '05), September, 2005.

• "Chip-Size" Antennas for Implantable Sensors and Smart Dust
  P. Basset, F. Alfaro, D. Novosel, A. de la Plaza, D. Stancil, and G. Fedder
  The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS '05), June, 2005, pp. 457 - 460.

• Conductive Polymer 'Molecular Wires' Increase Electrical Conductance Across Artificial Cell Membranes
  A.S. Widge, M. Jeffries-El, and Y. Matsuoka
  In The 26th Annual International Conference of the IEEE Engineering in Medicine and Biology Society, September, 2004, pp. 5058 - 5063. [Abstract]
  Download: pdf [383 KB] copyrighted

• Conductive Polymer 'Molecular Wires' For Neuro-Robotic Interfaces
  A.S. Widge, M. Jeffries-El, C. Lagenaur, V. Weedn, and Y. Matsuoka
  Proceedings of the 2004 IEEE International Conference on Robotics and Automation (ICRA '04), May, 2004. [Abstract]
  Download: pdf [536 KB] copyrighted

• A Versatile, Fast and Inexpensive Microfabrication Technique Using a One Metal and One Silicon Dioxide Film
  G.L. Subrebost and K. Gabriel
  Proceedings of the 2002 ASME International Mechanical Engineering Congress and Exposition (IMECE 2002), New Orleans, CA, November 17-22, 2002., ASME, Vol. 2, November, 2002. [Abstract]

• In Situ Fabricated Microchannels Using Porous Polymer and Xenon Difluoride Etchant
  G.L. Subrebost, A.J. Rosenbloom, V. Weedn, and K. Gabriel
  Proceedings of the Sixth International Symposium on Micro Total Analysis System (mTAS 2002), Nara, Japan, Nov. 2-8, 2002., November, 2002. [Abstract]

• Mock CMOS: An Inexpensive, Fast, and Versatile Microfabrication Technique Using One Metal and One Silicon Dioxide Film
  G.L. Subrebost
  tech. report CMU-RI-TR-02-13, Robotics Institute, Carnegie Mellon University, May, 2002. [Abstract]
  Download: pdf [3226 KB] copyrighted

• Actuation for Probe-Based Mass Data Storage
  F. Alfaro and G. Fedder
  Technical Proceedings of the Fifth International Conference on Modeling and Simulation of Microsystems (MSM '02), April, 2002, pp. 202 - 205.

• MEMS memory elements
  R. Carley, R.T. El-Sayed, D. Guillou, F. Alfaro, G. Fedder, S. Schlosser, D. Nagle, G. Ganger, and J. Bain
  Proceedings of the 2001 Non-Volatile Memory Technology Symposium (NVMTS '01), November, 2001, pp. 1 - 5.

• A Comparison of Induction-Detection NMR and Force-Detection NMR on Micro-NMR Device Design
  W. Lin and G. Fedder
  tech. report CMU-RI-TR-01-06, Robotics Institute, Carnegie Mellon University, March, 2001.
  Download: pdf [146 KB] copyrighted

• A CMOS-MEMS lateral-axis gyroscope
  H. Xie and G. Fedder
  Proceedings of The 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '01), January, 2001, pp. 162 - 165.
  Download: pdf [469 KB] copyrighted

• Emerging simulation approaches for micromachined devices
  T. Mukherjee, G. Fedder, D. Ramaswamy, and J. White
  IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, Vol. 19, No. 12, December, 2000, pp. 1572 - 1589. [Abstract]
  Download: pdf [335 KB] copyrighted

• Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives
  H. Xie, L. Erdmann, Q. Jing, and G. Fedder
  Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems (MSM 2000), March, 2000, pp. 181 - 184. [Abstract]
  Download: pdf [112 KB] copyrighted

• A 1 mG lateral CMOS-MEMS accelerometer
  H. Luo, G. Fedder, and R. Carley
  Proceedings of The 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), January, 2000, pp. 502 - 507. [Abstract]
  Download: pdf [491 KB] copyrighted

• A CMOS z-axis capacitive accelerometer with comb-finger sensing
  H. Xie and G. Fedder
  Proceedings of The 13th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '00), January, 2000, pp. 496 - 501. [Abstract]
  Download: pdf [539 KB] copyrighted

• A lateral capacitive CMOS accelerometer with structural curl compensation
  G. Zhang, H. Xie, L.E. de Rosset, and G. Fedder
  Proceedings of The 12th IEEE International Conference on Micro Electro Mechanical Systems (MEMS '99), January, 1999, pp. 606 - 611. [Abstract]
  Download: pdf [717 KB] copyrighted

• Design Methodology for Mixed-Domain Systems-on-a-Chip
  T. Mukherjee and G. Fedder
  IEEE Computer Society Workshop on VLSI, April, 1998. [Abstract]
  Download: pdf [93 KB] copyrighted

• Hierarchical Representation and Simulation of Micromachined Inertial Sensors
  J.E. Vandemeer, M.S. Kranz, and G. Fedder
  Modeling and Simulation of Micromsystems Conference, April, 1998. [Abstract]
  Download: pdf [318 KB] copyrighted

• Mechanical Property Measurement of 0.5-µm CMOS Microstructures
  M. Lu, X. Zhu, and G. Fedder
  MRS 1998 Spring Meeting, April, 1998. [Abstract]
  Download: pdf [171 KB] copyrighted

• Multi-mode Sensitive Layout Synthesis of Microresonator
  S. Iyer, T. Mukherjee, and G. Fedder
  International Conference on Modeling and Simulation of Microsystems, Semiconductors, Sensors and Actuators, April, 1998. [Abstract]
  Download: pdf [1764 KB] copyrighted

• Integrated MEMS in Conventional CMOS
  G. Fedder
  Proc. of the NSF/ASME Workshop on Tribology Issues and Opportunities in MEMS, Kluwer Academic Publishers, November, 1997. [Abstract]
  Download: pdf [249 KB] copyrighted

• Nodal Simulation of Suspended MEMS With Multiple Degrees of Freedom
  J.E. Vandemeer, M.S. Kranz, and G. Fedder
  ASME Winter Annual Conference, November, 1997. [Abstract]
  Download: pdf [91 KB] copyrighted

• Automated Optimal Synthesis of Microresonators
  G. Fedder, S. Iyer, and T. Mukherjee
  9th Int'l Conf. on Solid State Sensors and Actuators (Transducers '97), Vol. 2, June, 1997, pp. 1109-1112. [Abstract]
  Download: pdf [616 KB] copyrighted

• Structured Design Of Microelectromechanical Systems
  T. Mukherjee and G. Fedder
  Proceedings of 34th Design Automation Conference, June, 1997, pp. 680-685. [Abstract]
  Download: pdf [134 KB] copyrighted

• Distributed MEMS: New Challenges for Computation
  A. Berlin and K. Gabriel
  IEEE Computational Science and Engineering Journal, Vol. 4, No. 1, March, 1997, pp. 12-16. [Abstract]
  Download: pdf [132 KB] copyrighted

• A Vision of Structured CAD for MEMS
  G. Fedder
  Proceedings of the Fifth ACM/SIGDA Physical Design Workshop, April, 1996, pp. 76-80. [Abstract]
  Download: pdf [53 KB] copyrighted

• Physical Design for Surface-Micromachined MEMS
  G. Fedder and T. Mukherjee
  Proceedings of the Fifth ACM/SIGDA Physical Design Workshop, April, 1996, pp. 53-60. [Abstract]
  Download: pdf [119 KB] copyrighted

• Laminated High-Aspect-Ratio Microstructures in a Conventional CMOS Process
  G. Fedder, S. Santhanam, M.L. Reed, S. Eagle, D.F. Guillou, M. Lu, and L.R. Carley
  Proceedings of the IEEE Micro Electro Mechanical Systems Workshop, February, 1996, pp. 13-18. [Abstract]
  Download: pdf [1209 KB] copyrighted

• Modeling and Simulation of Microresonators with Meander Suspensions
  G. Fedder and K.H. Clark
  Simulation and Design of Microsystems and Microstructures, Computational Mechanics Publications, September, 1995, pp. 175-183. [Abstract]
  Download: pdf [175 KB] copyrighted