Robotics Institute: Past projects, Microelectromechanical Systems Laboratory

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Past projects, Microelectromechanical Systems Laboratory

Embedded Microinstruments for Space Applications
Integrated MEMS for Space Applications
Silicon Micro-Disk Arrays for Data Storage - Silicon microdisk fabrication
Silicon/Neuron Interface - We are developing a robust, low-power microengineered interface between living neurons and silicon circuitry.
Tactile Displays Using MEMS Actuator Arrays - We are developing tactile dusplays using MEMS actuator arrays

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