RI | Research | Labs | MEMS Laboratory | Past projects

Text only version of this site

Past projects, Microelectromechanical Systems Laboratory

Embedded Microinstruments for Space Applications	Integrated MEMS for Space Applications
Silicon Micro-Disk Arrays for Data Storage - Silicon microdisk fabrication	Silicon/Neuron Interface - We are developing a robust, low-power microengineered interface between living neurons and silicon circuitry.
Tactile Displays Using MEMS Actuator Arrays - We are developing tactile dusplays using MEMS actuator arrays